Significantly improved high k dielectric performance:Rare earth oxide as a passivation layer laminated with TiO2 film
passivation、improved、layer、oxide、earth、high、with、rare、dielectric、film
41
TB114.3;S;TP316
2023-09-08(万方平台首次上网日期,不代表论文的发表时间)
共9页
1376-1384