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A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication

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The authors would like to thank Dr.Dimitrios Kontziampasis for his contribution in the AFM measurements and his important work on the development of the plasma directed assembly process.This work was supported by a the Research Excellence Project”Plasma Directed Assembly and Organization—PlasmaNaProject ID 695;is co-funded by the European Social Fund;National Resources,b the Ph.D.fellowship programme of NCSR Demokritos which supported Dr.A.Smyrnakis,and c the M.Smoluchowski Krakow Research Consortium

2019-09-25(万方平台首次上网日期,不代表论文的发表时间)

共10页

475-484

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化学科学与工程前沿

2095-0179

11-5981/TQ

13

2019,13(3)

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国家重点研发计划“现代服务业共性关键技术研发及应用示范”重点专项“4.8专业内容知识聚合服务技术研发与创新服务示范”

国家重点研发计划资助 课题编号:2019YFB1406304
National Key R&D Program of China Grant No. 2019YFB1406304

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