A novel hanging bowl-shaped mask for the fabrication of vertical sidewall structures
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This research was supported by the National Natural Science Foundation of China Grant No.10974037,the CAS Strategy Pilot program Grant No.XAD 09020300,and the National Basic Research Program of China Grant No.2010CB934102.
2016-05-24(万方平台首次上网日期,不代表论文的发表时间)
共4页
111-114