Development and application of high-end aerospace MEMS
microelectromechanical systems、manufacturing technology、high performance、high precision
12
TQ4;TQ0
The author sincerely thanks all the researchers and postgraduates who participated in the corresponding projects in the MicroNano System Laboratory of NWPU.The author is also grateful for the support given by the National Natural Science Foundation,the Ministry of Science and Technology,the Army General Armaments Department,and the State Administration for Science and Technology for National Defense
2017-12-15(万方平台首次上网日期,不代表论文的发表时间)
共7页
567-573