Design and Imaging Application of Room-Temperature Terahertz Detector with Micro-Bolometer Focal Plane Array

机标关键词：optical characteristics、reactive ion etching、magnetron sputtering、combined process、vanadium oxide、cell structure、test results、focal plane

所属期刊栏目：14

分类号：O3 ;TN3

资助基金：Manuscript received March 10,2016;revised May 18,2016. This work was supported by the National Science Funds for Creative Research Groups of China under Grant No.61421002 and National High Technology Research and Development Program under Grant No.2015AA8123014

在线出版日期：2016-07-21（万方平台首次上网日期，不代表论文的发表时间）

页数：共5页

页码：98-102