Preparation of 3 Inch Double-Sided YBa2Cu3O7-X High Temperature Superconducting Thin Films

摘要：

@@ Owing to its excellent electrical property,YBCO thin film is much better than metal in the application for microwave devices. It makes the devices smaller, lighter, and with higher quality factor and lower insertion loss. YBCO thin film has attracted attentions for many years. Aiming at the uniformity and property of 3-inch double-sided YBCO thin film, the following aspects is considered in this dissertation:

机标关键词：Superconducting Thin Films、thin film、electrical property、microwave devices、quality factor、insertion loss

所属期刊栏目：3

分类号：TN3(半导体技术)

在线出版日期：2005-07-14（万方平台首次上网日期，不代表论文的发表时间）

页数：共2页

页码：190-191