多晶硅太阳电池的有效等离子体氢钝化

摘要：

A simple equipment and process for hydrogen passivation of multicrystalline silicon (mc-Si) solar cells are reported in this work. Hydrogen plasma is generated by means of AC glow discharge in hydrogen atmosphere. Hydrogen passivation is carried out with three different groups of mc-Si solar cells after finishing contacts. The experimental results demonstrate that the photovoltaic performances of the solar cell samples have been improved after hydrogen plasma treatment, with a relative increase in conversion efficiency up to 10.6%.

关键词：multicrystalline silicon、solar cells、plasma hydrogen passivatoin

所属期刊栏目：22

分类号：TM914.41

在线出版日期：2004-01-08（万方平台首次上网日期，不代表论文的发表时间）

页数：共4页

页码：9-12