LTPS TFT层间绝缘层过孔刻蚀的工艺优化
LTPS TFT LCD、干法刻蚀、湿法刻蚀、层间绝缘层过孔、接触电阻、器件性能
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TN43(微电子学、集成电路(IC))
国家863重大专项2013AA030601;福建省科技重大专项2014HZ0003-1;福建省自然科学基金No.2014J01236Foundation by National High Technology Research and Development Program of China2013AA030601;Important National Science & Technology Specific Projects of Fujian Province,China2014HZ0003-1;Natural Science Foundation of Fujian Province,China2014J01236
2016-08-05(万方平台首次上网日期,不代表论文的发表时间)
共7页
363-369