Growth and properties of hydrogenated microcrystalline silicon thin films prepared by magnetron sputtering with different substrate temperatures
different、silicon、micro、growth、thin、with、crystalline、films、hydrogenated、magnetron
41
TP332;S;R445.1
2022-05-11(万方平台首次上网日期,不代表论文的发表时间)
共6页
1037-1042