Improved resistance to electromigration and acoustomigration of Al interdigital transducers by Ni underlayer
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This study was financially supported by the National Key Research and Development Program of China2016YFB0402700;Beijing Science and Technology ProjectD171100004617001
2019-05-28(万方平台首次上网日期,不代表论文的发表时间)
共8页
823-830