Characterization and analysis of DLC films with different thickness deposited by RF magnetron PECVD

机标关键词：PECVD、different、DLC films、analysis

所属期刊栏目：31

分类号：S56;F23

资助基金：the National Natural Science Foundation of China.50972078 and 51002090;the Outstanding Young Scientist Research Award Fund of Shandong ProvinceBS2010CL028

在线出版日期：2012-07-03（万方平台首次上网日期，不代表论文的发表时间）

页数：共6页

页码：198-203