Effects of growth temperature on μc-Si:H films prepared by plasma assistant magnetron sputtering

机标关键词：growth temperature

所属期刊栏目：31

分类号：O48

资助基金：the Cultivation Fund of the Key Scientific and Technical Innovation Project, Ministry of Education of China707015;University Innovative Research Team Project of Liaoning Province

在线出版日期：2012-07-03（万方平台首次上网日期，不代表论文的发表时间）

页数：共5页

页码：193-197