Ti-Si-N films prepared by magnetron sputtering

机标关键词：magnetron sputtering

所属期刊栏目：31

资助基金：This project was financially supported by the Cultivation Fund of the Key Scientific and Technical Innovation Project and Ministry of Education of China 707015

在线出版日期：2012-07-03（万方平台首次上网日期，不代表论文的发表时间）

页数：共6页

页码：183-188