Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature

机标关键词：room temperature、RF magnetron sputtering、ZnO thin films、optical properties of、gas content

所属期刊栏目：30

分类号：TU5;TQ1

资助基金：This work is financially supported by the National Natu-ral Science Foundation of China.60876055 and 11074063;the Natural Science foundation of Hebei Pmvince,China.E2008000620 and E2009000207;the Specialized Research Fund for the Doctoral Program of Higher Education of China20091301110002;the Key Basic Research Program of Hebei Provincial Applied Basic Research Plan10963525D

在线出版日期：2011-06-22（万方平台首次上网日期，不代表论文的发表时间）

页数：共5页

页码：170-174