Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters
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This work was financially supported by the National Basic Research Program of China2007CB607602;the Science Found for Distinguished Yong Scholars of Heilongjiang Province,ChinaJC200901;the National Natural Science Foundation of China50875058;the Program of Excellent Teams of Harbin Institute of Technology
2011-06-22(万方平台首次上网日期,不代表论文的发表时间)
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142-145