飞秒激光脉冲能量累积优化对黑硅表面形貌的影响
飞秒激光、微结构、黑硅、表面形貌
66
TP7;TP3
国家自然科学基金61605017;长春市科技计划14KP007;长春理工大学青年科学基金XQNJJ-2015-01;光电信息控制和安全技术重点实验室基金资助的课题. Project supported by the National Natural Science Foundation of ChinaGrant 61605017;the Science and Technology Planning Project of Changchun, ChinaGrant 14KP007;the Young Scientists Fund of Changchun University of Science and Technology, ChinaGrant XQNJJ-2015-01;the Foundation of the Science and Technology on Electro-Optical Information Security Control Laboratory, China
2017-04-24(万方平台首次上网日期,不代表论文的发表时间)
共9页
331-339