Fabrication of Nanoscale Step Height Structure Using Atomic Layer Deposition Combined with Wet Etching
Wet Etching、Atomic Layer Deposition
29
TN4;TB3
National Natural Science Foundation of ChinaGrant 51175418;Major Research Program on Nanomanufacturing of National Natural Science Foundation of ChinaGrant 91323303;Fund of the State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University and Tsinghua University of ChinaGrant PIL1403;Collaborative Innovation Center of Suzhou Nano Science and Technology of China
2016-05-17(万方平台首次上网日期,不代表论文的发表时间)
共7页
91-97