DESIGN AND CONTROL OF AN ULTRAPRECISION STAGE USED IN GRATING TILING
position and orientation、positioning precision、voltage control、key technology、high precision、PID algorithm
20
TK4(内燃机)
Nanotechnology Promotion Center, Science and Technology Commission of Shanghai Municipality, China0359nm004
2007-06-18(万方平台首次上网日期,不代表论文的发表时间)
共4页
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