COMPACT PHASE GRATING INTERFERENCE SENSOR FOR MICRO-DISPLACEMENT
measuring range、topography parameters、development platform、vertical resolution、virtual instrument、signal processing、software system、high resolution、curved surface、phase grating、phase shift、method of
19
TP2(自动化技术及设备)
国家自然科学基金;received in revised form May 850175037
2006-04-27(万方平台首次上网日期,不代表论文的发表时间)
共3页
131-133