10.13538/j.1001-8042/nst.26.010101
Developments at SSRF in soft X-ray interference lithography
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the National Key Basic Research Program of China2012CB825700;the Open Research Project of Large Scientific Facility from Chinese Academy of Sciences:Study on Self-Assembly Technology and Nanometer Array with Ultra-high Density
2015-06-17(万方平台首次上网日期,不代表论文的发表时间)
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