Coexistance of C40 and C54 TiSi2 during the solid state reaction of Ti/Mo/Si system
metastable phase、phase formation、low temperature、Si substrate
13
TN304.1+2;TN304.2+6;TN305.3;O472+.1(半导体技术)
国家自然科学基金19910131370
2004-01-08(万方平台首次上网日期,不代表论文的发表时间)
共6页
19-24