Total dose radiation effects of pressure sensors fabricated on Unibond-SOI materials
pressure sensors、voltage deviation、radiation dose、high quality
12
TN386.1(半导体技术)
Supported by Science and Technology Development Foundation of Shanghai under Grant98JC14004;国家自然科学基金69876007
2004-01-08(万方平台首次上网日期,不代表论文的发表时间)
共6页
209-214