CURRENT TRENDS OF MICRO- AND NANOMECHANICS

摘要：

@@ IntroductionScaling down to the micro- and nanoscale is a strong current trend in the development of science and technology. ”Small is energy efficient and cost effective” has long been for the motto of the semiconductor industry, including micro- and nanoelectronics, micro-electro-mechanical systems (MEMS) and nano- electro-mechanical systems (NEMS). But shrinking to small scales brings big challenges to traditional disciplines, including mechanics.

机标关键词：cost effective、traditional、development、Small、Scaling、energy、NEMS、MEMS、long

所属期刊栏目：22

分类号：TN3;R73

在线出版日期：2010-03-29（万方平台首次上网日期，不代表论文的发表时间）

页数：共3页

页码：I-III