DETERMINATION OF ULTRA TRACE LEVEL METALLIC IMPURITIES IN SEMICONDUCTOR MATERIALS BY ICP-MS

摘要：

@@ IntroductionSemiconductor devices have been widely used for various applications and become indispensable for civilized life-style.

机标关键词：SEMICONDUCTOR MATERIALS

所属期刊栏目：20

分类号：O4(物理学)

在线出版日期：2007-01-29（万方平台首次上网日期，不代表论文的发表时间）

页数：共3页

页码：167-169